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Controlling contamination in liquid, air and gas process streams enables more productive and technologically superior semiconductor, flat panel displays, data storage, photovoltaic, life sciences, lithium ion battery and other microelectronic manufacturing processes. Entegris provides filtration solutions based on a variety of media and membrane technologies using performance criteria as well as analytical services to detect contamination in technology environments and analyze/validate materials.
Solutions for chemical filtration of airborne molecular contamination (AMC)
Nickel, stainless steel and Teflon® filtration technologies for high-purity gas applications
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